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광학측정 시 각도변화에 따른 표면거칠기 오차발생에 관한 연구 KCI 등재

Study on Occurrence of Error in Surface Roughness Due to Changes in Angle during Optical Measurement

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한국기계기술학회지 (Journal of the Korean Society of Mechanical Technology)
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

The results of the measurements using an optical surface roughness meter are shown according to the angle changes of 0, 0.5, 1, 1.5, 2, and 3°. Through the experiment, it can be seen that the measurement value is 3.140 at 0°, 3.148 at 0.5°, 3.140 at 1°, 3.151 at 1.5°, 5.078 at 2°, and 4.790 at 3° setting. In addition, the test statistic (P) value is 0.000, which is smaller than the significance level of 0.005, so it was confirmed through the experiment that a measurement error occurs according to the angle change when measuring the surface roughness.

목차
Abstract
1. 서 론
2. 관련이론
    2.1 표면 거칠기 측정이론
    2.2 측정기 구조 및 원리
3. 실험장치 및 방법
3. 결과 및 고찰
4. 결 론
References
저자
  • 최지선(Assistant Professor Dept. Semiconductor convergence machine of Korea Polytechnic colleges) | J. S Choi
  • 정현석(Dept. Semiconductor quality measurement of Korea Polytechnic colleges) | H. S Jung Corresponding author