반도체 산업에서 Chemical Filter의 중요성과 한계

논문 상세보기

Importance and Limitation of Chemical Filter in Semiconductor Industry

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한국막학회 (The Membrane Society Of Korea)

저자

함성보(Defect & Environment Control, SK 하이닉스) | Soungbo Ham (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea) Corresponding author
김정현(Defect & Environment Control, SK 하이닉스) | Jeonghyeon Kim (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea)
김정모(Defect & Environment Control, SK 하이닉스) | Jeongmo Kim (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea)
박병준(Defect & Environment Control, SK 하이닉스) | Byungjun Park (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea)
김민중(Defect & Environment Control, SK 하이닉스) | Minjoong Kim (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea)
김준한(Defect & Environment Control, SK 하이닉스) | Junhan Kim (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea)
최은미(Defect & Environment Control, SK 하이닉스) | Eunmi Choi (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea)
김기봉(Defect & Environment Control, SK 하이닉스) | Kibong Kim (Defect & Environment Control, SK Hynix, Icheon, Gyeonggi-do, Republic of Korea) Corresponding author

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