논문 상세보기
Analysis of Sintering Behavior and Microstructure of Mo-Ta Alloy under Different Sintering Conditions KCI 등재
- 언어ENG
- URLhttps://db.koreascholar.com/Article/Detail/452786
pp.130-136
Molybdenum-tantalum (Mo-Ta) alloy sputtering targets are widely used in electronic applications owing to their excellent corrosion resistance, high thermal and electrical conductivity, and low electrical impedance. In this study, the sintering behavior and microstructural evolution of Mo-Ta alloys fabricated by spark plasma sintering (SPS) were investigated as a function of sintering temperature in the range of 1650-1800 °C. X-ray diffraction and microstructural analyses indicate that densification and alloying of the mixed Mo and Ta powders occur simultaneously during the SPS process. Increasing the sintering temperatures significantly enhances densification, and the compact sintered at 1750 °C achieves a relative density exceeding 99%, which is essential for high-quality sputtering target applications. The sintered alloys exhibit a clear temperature-dependent grain growth behavior together with a homogeneous microstructure and randomly oriented grains. These results demonstrate that appropriate control of sintering temperature enables the fabrication of dense and microstructurally uniform Mo-Ta alloys, providing valuable guidelines for optimizing sputtering target performance.
재료 및 방법
분석 대상 재결서와 사례 선정
지향적 질적 내용분석의 적용
복원성 저하 경로의 이론적 근거
위험유형 분류 기준표의 도출
위험유형 부호화 절차
결과 및 고찰
분석 대상 사고의 개요
사고별 위험유형 분류 결과
사고 당시 운항 국면에 따른 위험유형 구성
위험유형의 조합과 사례 간 비교
유형별 안전관리 시사점과 조업하중 계측 과제
결 론
사 사
References
