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Optimization of Plasma Process to Improve Plasma Gas Dissolution Rate using Three-neck Nozzle

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한국환경과학회지 (Journal of Environmental Science International)
한국환경과학회 (The Korean Environmental Sciences Society)
초록

The dissolution of ionized gas in dielectric barrier plasma, similar to the principle of ozone generation, is a major performance-affecting factor. In this study, the plasma gas dissolving performance of a gas mixing-circulation plasma process was evaluated using an experimental design methodology. The plasma reaction is a function of four parameters [electric current (X1), gas flow rate (X2), liquid flow rate (X3) and reaction time (X4)] modeled by the Box-Behnken design. RNO (N, N-Dimethyl-4-nitrosoaniline), an indictor of OH radical formation, was evaluated using a quadratic response surface model. The model prediction equation derived for RNO degradation was shown as a second-order polynomial. By pooling the terms with poor explanatory power as error terms and performing ANOVA, results showed high significance, with an adjusted R2 value of 0.9386; this indicate that the model adequately satisfies the polynomial fit. For the RNO degradation, the measured value and the predicted values by the model equation agreed relatively well. The optimum current, gas flow rate, liquid flow rate and reaction time were obtained for the highest desirability for RNO degradation at 0.21 A, 2.65 L/min, 0.75 L/min and 6.5 min, respectively.

목차
Abstract
1. 서 론
2. 재료 및 방법
    2.1. 실험재료 및 실험방법
    2.2. Box-Behnken법과 반응표면분석
3. 결과 및 고찰
    3.1. 반응표면분석에 의한 반응모형 추정 및 유의성 검증
    3.2. RNO 분해에 대한 잔차분석
    3.3. RNO 분해에 대한 2차원 등고선도 및 3차원 반응표면도 및 공정최적화
4. 결 론
감사의 글
REFERENCES
저자
  • 김동석(대구가톨릭대학교 환경과학과) | Dong-Seog Kim (Department of Environmental Science, Catholic University of Daegu)
  • 박영식(대구대학교 자유전공학부) | Young-Seek Park (Division of Liberal Studies, Daegu University) Corresponding author