Defects of zeolite membranes often lower their separation performance. Thus, the investigation of the defects is highly critical in achieving high separation performance. While general characterization methods (e.g. scanning electron microscopy; SEM) that examine the membrane surface cannot detect defects, the FCOM measurement is able to identify the defective structure inside the zeolite membrane using dye molecules of appropriate size [1]. In this work, various dyeing conditions (times and concentrations) were applied to a MFI zeolite membrane in an attempt to investigate the defective structure. Furthermore, the quantitative analysis is practiced to measure the defects in numerical form.