Using lanthanum zinc oxide (LZO) film with the ion-beam irradiation, uniform and homogeneous liquid crystal (LC) alignment was achieved. To fabricate the LZO thin film on glass substrate, solution process was conducted as a deposition method. Cross-polarized optical microscopy (POM) and the crystal rotation method reveal the state of LC alignment on the ion-beam irradiated LZO film. Between orthogonally placed polarizers, POM image showed constant black color with regular transmittance. Furthermore, collected incidence angle versus transmittance curve from the crystal rotation method revealed that the LC molecules on the ion-beam irradiated LZO film were aligned homogeneously. Atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS) were conducted to reveal the relationship between the ion-beam irradiation and the LC alignment. The ion-beam irradiation changed the LZO film surface to rougher than before by etching effect. Numerical roughness values from AFM analysis supported this phenomenon specifically. XPS analysis showed the chemical composition change due to the ion-beam irradiation by investigation of O 1s, La 3d and Zn 2p spectra. The ion-beam irradiation induced the breakage of chemical bonds in the LZO film surface and this occurred surface chemical anisotropic characteristics for uniform LC alignment.