As the solar power generation system expands, researches on the development and production technology of solar modules are being actively conducted. In addition, in the production of polysilicon for solar modules, a high-purity carbon electrode is essential, which greatly affects the performance and productivity of the solar module. This research is about the development of a carbon electrode used to manufacture high-purity polysilicon rod, which is essential for the manufacture of the photovoltaic modules. Fine graphite chuck is used as a carbon electrode. Generally, it is a consumable material that is used once and discarded. Therefore, this study aimed to develop an assembly-type high purity graphite chuck that can recycle some resources to dramatically improve the utilization of resources. In order to maintain the purity and performance of polysilicon, the composition and performance of the graphite chuck are important. The fine graphite chuck is manufactured through the high-purification process after precision machining, and the performance is confirmed through the component analysis of the specimen. At about 5,000 nm or more from the surface, the compositions of the sample appeared almost constant, and a high purity sample satisfying the target specification was obtained. In addition, it was confirmed that the cost reduction could be achieved by designing the graphite electrode as a separable type, and the results of this study can be applied to the design of the fine graphite chuck for the production of high purity polysilicon.