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        1.
        2012.03 KCI 등재 구독 인증기관 무료, 개인회원 유료
        This paper presents the design and simulation results of a piezo-driven motion stage that employs a novel cross hinge structure that is more efficient and flexible than previous designs. The newly designed motion stage enables close to nanometer-precision motion control with ranges up to 1.6mm. Simulation results show the effectiveness of the novel hinge structures and the performance of the proposed design.
        4,000원