Recently, halogen lamps for vehicle exterior lamp systems are being replaced by LEDs (Light Emitting Diode) in consideration of miniaturization, power consumption, life, luminance, and eco-friendliness. Due to regulations on the amount of light required, luminance, light uniformity, and glare prevention, it is required to develop a light guide for controlling a light source of an LED lamp for a vehicle. For the development of the light guides, the development of machining technology that can cut micro patterns of hundreds of micrometers scale into surface roughness of tens of nanometers scale must be preceded. In this study, the effect of variations in cutting conditions on surface roughness was analyzed through experiments. The micro patterns was manufactured by cutting into STAVAX material, and the surface of the micro patterns was super-finished using a ball-shaped PCD (polycrystalline diamond) tool without flutes. In experiments, the cutting conditions of the super-finishing process were varied, and the varied cutting conditions were feed rate, radial depth of cut, and spindle speed