In this study, a low temperature growth of high-quality carbon nanotubes on glass substrate using a local surface heating without heating damage to substrate was tried and characterized. The local joule heating was induced to only Ni/Ti metal film on glass substrate by applying voltage to the film. It was estimated that local surface joule heating method could heat the metal surface locally up to around 1200℃ by voltage control. We could successfully obtain high-quality carbon nanotubes grown at 300℃ by applying 125 V for joule heating as same as carbon nanotubes grown at 900℃.