This study analyzed and identified various causes of caustic alarms of 163 fire detectors that occurred from January 2019 to December 2021 at domestic semiconductor manufacturing plants equipped with about 30,000 fire detectors, and proposed a new non-fire prevention cause investigation plan by applying the NFPA 921 scientific methodology. The results of the study are as follows. First, in terms of necessary recognition and problem definition, an analog detector and an integrated monitoring system were proposed to quickly determine the location and installation space information of the fire detector. Second, in order to prevent speculative causes and errors in various analyses in terms of data analysis and hypothesis establishment, non-fire reports were classified into five by factor and defined, and the causes of occurrence by factor were classified and proposed. Finally, in terms of hypothesis verification and final hypothesis selection, a non-fire prevention improvement termination process and a final hypothesis verification sheet were proposed to prevent the cause from causing re-error.