The effects of noble gas (such as helium, neon, argon, krypton, and xenon) on the sonolytic decomposition of water and 2-methyl-2-propanol(t-butanol) with 200 kHz high power ultrasound were investigated. The physical properties of the noble gas have an effect on the formation rate of products (H2O2, H2, O2) and the decomposition rate on the sonolytic decomposition of water. The pyrolysis products, such as methane, ethane, ethylene, and acetylene are formed during the sonolytic decomposition of t-butanol. From the estimation of the ratio [C2H4 + C2H2] / [C2H6], the cavitation temperature would be varied by the used noble gas. In all cases for the sonolytic decomposition of water, t-butanol, and diethyl phthalate, the decomposition rates were xenon > krypton > argon > neon > helium with a significant difference and were closely correlated with the formation rate of OH radical and high temperature inside the cavitation bubble under each noble gas.