In this study, several kinds of active carbons with high specific surface area and micro pore structure were prepared from the coconut shell charcoal using chemical activation method. The physical property of prepared active carbon was investigated by experimental variables such as activating chemical agents to char coal ratio, flow rate of inert gas and temperature. It was shown that chemical activation with KOH and NaOH was successfully able to make active carbons with high surface area of 1900~2500 m2/g and mean pore size of 1.85~2.32 nm. The coin cell using water-based binder in the electrolyte of LiPF6 dissolved in mixed organic solvents (EC:DMC:EMC=1:1:1 vol%) showed better capacity than that of oil-based binder. Also, it was found that the coin cell of water-based binder shows an improved cycling performance and coulombic efficiency.

Modified thermal annealing was applied to the activation of the polycrystalline silicon films doped as p-type through implantation of B2H6. The statistical design of experiments was successfully employed to investigate the effect of rapid thermal annealing on activation of polycrystalline Si doped as p-type. In this design, the input variables are furnace temperature, power of halogen lamps, and alternating magnetic field. The degree of ion activation was evaluated as a function of processing variables, using Hall effect measurements and Raman spectroscopy. The main effects were estimated to be furnace temperature and RTA power in increasing conductivity, explained by recrystallization of doped ions and change of an amorphous Si into a crystalline Si lattice. The ion activation using rapid thermal annealing is proven to be a highly efficient process in low temperature polycrystalline Si technology.