In this study, a smart isolation platform has been developed for control of microvibration of high-technology facilities, such as semi-conductor plants and TFT-LCD plants. Previously, microvibration control performance of a smart base isolation system has been investigated. This study compared microvibration control performance of a smart isolation platform with that of conventional base isolation and fixed base. For this purpose, train-induced ground acceleration is used for time history analysis. An MR damper was used to compose a smart isolation platform. A fuzzy logic controller was used as a control algorithm and it was optimized by a multi-objective genetic algorithm. Numerical analysis shows that a smart isolation platform can effectively control microvibration of a high-technology facility subjected to train-induced excitation compared with other models.

Reduction of microvibration is regarded as important in high-technology facilities with high precision equipments. In this paper, smart control technology is used to improve the microvibration control performance. Mr damper is used to make a smart base isolation system amd fuzzy logic control algorithm is employed to appropriately control the MR damper. In order to develop optimal fuzzy control algorithm, a multi-objective genetic algorithm is used in this study. As an excitation, a train-induced ground acceleration is used for time history analysis and three-story example building structure is employed. Microvibration control performance of passive and smart base isolation systems have been investigated in this study. Numerical simulation results show that the multi-objective genetic algorithm can provide optimal fuzzy logic controllers for smart base isolation system and the smart control system can effectively reduce microvibration of a high-technology facility subjected to train-induced excitation.

정밀한 공정을 요구하는 반도체 및 TFT-LCD와 같은 첨단 기술산업 공장의 미진동 문제는 제품의 성능에 영향을 주는 주요한 인자로서 정밀기기 및 부품의 제조공정에 있어서 중요시 되어왔다. 본 논문에서는 이러한 첨단시설물의 미진동 문제를 해결하기 위하여 기초면진시스템의 미진동제어성능을 검토하였다. 이를 위하여, 기차에서 유발되는 인공지반운동을 생성하여 시간이력해석을 수행하였고 3층 예제구조물을 사용하였다. 수치해석을 통하여 수동 기초면진 및 스마트 면진시스템의 미진동제어성능을 고정기초구조물과 비교하였다. 그 결과 스마트 면진시스템이 미진동제어에 있어서 우수한 제어성능을 나타내는 것을 확인하였다.