The study on semiconductor industrial accident in korea has been focused on frequencies of each type, employee, characteristics, cause and un-safety condition, behaviour and so on. Those attributes of semiconductor industrial accidents were usually analyzed independently, so that it was hard to provides a well-process and systematic guide lines for efficient safety management. There fore, there were a few studies based on comprehensive survey in terms of sharp-type of safe management. The questionnaire survey carried out for the workers(284) who were responsible for safety management in to center with corporate company with semiconductor industry the factor analysis showed that there were three factor of safety management. They were 1) Investment and operation and management for accident prevention, 2) Unsafe, safety management 3) General human error and behavior the industries of respondents were correlative with three group. Three Groups showed a statistically significant differences on the number of cases. Actually, the group with the larger investment and the better unsafe cause, human error a of accident prevention had a smaller cause of accident cases.