입자법을 이용한 스크류젯의 성능 예측에 관한 연구 Study on the Performance Prediction of Screw Jet using Moving Particle System
pp.1199-1204
Screw jet equipment has been developed based on the existing accumulated experimental indicators in the semiconductor industry, and for specific performance development, it is necessary to visually check a process in which a high viscosity solution is discharged to a nozzle through a screw. Since the transparency of the exterior is not guaranteed after design and production due to the characteristics of the equipment, simulation must be performed to confirm the performance data according to the internal shape. Therefore, in this study, the screw jet equipment was simulated using the moving particle system, and through this, all processes of the screw jet internal solution flow were visually checked and computerized data capable of predicting the performance of the equipment was secured.