The decomposition of NF3 using only an electron beam, and an electron beam in the presence of hydrogen are assessedin terms of the destruction and removal efficiency (DRE, %). Experiments were conducted at a flow rate of 500LPM.The inlet concentration of NF3 in nitrogen gas was about 1,000ppm, and the concentration of hydrogen ranged from 1,500to 8,000ppm, respectively. Absorbed dose (kGy) and electric current ranged from 33.87 (5mA) to 203.21kGy (30mA).The results in this study indicate that the DRE increased about 35% with hydrogen addition at electric current 30mA.Additionally hydrogen gas played a significant role in the constituents of byproducts.

• 최창용(한국원자력연구원 공업환경연구부) | Chang-Yong Choi
• 김종범(한국원자력연구원 공업환경연구부) | Jong-Bum Kim
• 조정건(한국원자력연구원 공업환경연구부) | Jung-gun Jo
• 장성호(부산대학교 바이오환경에너지학과) | Seong-Ho Jang
• 손영일(한국환경산업기술원) | Young-il Son
• 류재용(경남대학교 도시환경공학과) | Jae-Yong Ryu Corresponding author