With the development of nanotechnology, nanomaterials are used in various fields. Therefore, the interest regarding the safety of nanomaterial use is increasing and much effort is diverted toward establishment of exposure assessment and management methods. Occupational exposure limits (OELs) are effectively used to protect the health of workers in various industrial workplaces. This study aimed to propose an OEL for domestic multi-walled carbon nanotubes (MWCNTs) based on animal inhalation toxicity test. Basic procedure for development of OELs was examined. For OEL estimation, epidemiological study and quantitative risk assessment are generally performed based on toxicity data. In addition, inhalation toxicity data-based no observed adverse effect level (NOAEL) and benchmark dose (BMD) are estimated to obtain the OEL. Three different estimation processes (NEDO in Japan, NIOSH in USA, and Baytubes in Germany) of OELs for carbon nanotubes (CNTs) were intensively reviewed. From the rat inhalation toxicity test for MWCNTs manufactured in Korea, a NOAEL of 0.98 mg/㎥ was derived. Using the simple equation for estimation of OEL suggested by NEDO, the OEL of 142 μg/㎥ was estimated for the MWCNT manufacturing workplace. Here, we used test rat and Korean human data and adopted 36 as an uncertainty factor. The OEL for MWCNT estimated in this work is higher than those (2-80 μg/㎥) suggested by previous investigators. It may be greatly caused by different physicochemical properties of MWCNT and their dispersion method and test rat data. For setting of regulatory OELs in CNT workplaces, further epidemiological studies in addition to animal studies are needed. More advanced technical methods such as CNT dispersion in air and liquid should be also developed.

Volatile Organic Compounds in Urban Atmosphere are contributing largely at significant risks to human health andhave caused serious problems such as ozone formation. This study is to identify the effects of DRE (destruction andremoval efficiency) and carbonization of styrene when using the electron beam energy. The irradiation intensity of electronbeam energy was 1mA, 5mA and irradiation time were 5sec and 10sec. The styrene was completely destroyed at 5mA.Main by-products was aerosol particles. Aerosol particle formation was increased with increasing irradiation intensity.Most of the by-products of particle were carbon.

The decomposition of NF3 using only an electron beam, and an electron beam in the presence of hydrogen are assessedin terms of the destruction and removal efficiency (DRE, %). Experiments were conducted at a flow rate of 500LPM.The inlet concentration of NF3 in nitrogen gas was about 1,000ppm, and the concentration of hydrogen ranged from 1,500to 8,000ppm, respectively. Absorbed dose (kGy) and electric current ranged from 33.87 (5mA) to 203.21kGy (30mA).The results in this study indicate that the DRE increased about 35% with hydrogen addition at electric current 30mA.Additionally hydrogen gas played a significant role in the constituents of byproducts.

Sulfur hexafluoride has an extremely high global warming potential (GWP) because of strong absorption of infraredradiation and long atmospheric lifetime which cause the global warming effect. This study is to identify the effects ofdestruction and removal efficiency of SF6 by the addition of conditioning agent (oxygen, water vapor and hydrogen) whenusing the high ionization energy. The irradiation intensity of ionization energy was 2mA, 5mA, 10mA and 15mA. TheSF6 was completely removed with H2O and H2 gas injection at 2mA. Main by-products were HF and F2 gases. HF andF2 gas formation was increased with irradiation intensity increasing. Most of the by-products of particle were sulfur andmetal sulfate.

SF6 (sulfur hexafluoride) gas has an extremely high global warming potential (GWP) because of strong absorption of infrared radiation and long atmospheric lifetime which cause the global warming effect. The objective of this study is to identify the effects of destruction and removal efficiency (DRE) of SF6 by the addition of oxygen, water vapor and hydrogen. The applied dose of ionization energy was 1,028 kGy(5 mA). The initial concentrations of SF6, O2, H2O and H2 gases were 1,000 ppm, 1,000 ppm, 3,000 ppm, 3,000 ppm, respectively. The DRE was increased about 2 times with O2 gas injection. The SF6 was completely removed with H2O and H2 gas injection. By-products formed by SF6 destruction were mainly HF and F2 gases. In addition, SF2, NF3, N2O, SO2, SO2F2, and NOx gases were produced.

Nitrogen trifluoride (NF3) has been used as a novel etching and cleaning gas in semiconductor industry. Recently, the many studies about NF3 decomposition have been performed due to high global warming potential (GWP : 17,000). In this study, the role of conditioning agents such as H2, O2, and H2O (water vapor) in the destruction of NF3 gas using electron-beam technology is assessed in terms of the destruction and removal efficiency (DRE, %). The inlet concentration of NF3 was 1,000 ppm and the concentration of conditioning agents ranged from 250 to 1,500 ppm respectively and electron beam current was 5 mA. From the result, the by-products of NF3 decomposition were NO, N2O, and HF.