CMP(Chemical Mechanical Polishing) Processes have been used to improve the planarization of the wafers in the semiconductor manufacturing industry. Polishing performance of CMP Process is determined by the chemical reaction of the liquid sol containing abrasive, pressure of the head portion and rotational speed of the polishing pad. However, frictional heat generated during the CMP process causes agglomeration of the particles and the liquidity degradation, resulting in a non-uniform of surface roughness and surface scratch. To overcome this chronic problem, herein, we introduced NaCl salt as an additive into silica sol for elimination the generation of frictional heat. The added NaCl reduced the zata potential of silica sol and increased the contact surface of silica particles onto the sapphire wafer, resulting in increase of the removal rate up to 17 %. Additionally, it seems that the silica particles adsorbed on the polishing pad decreased the contact area between the sapphire water and polishing pad, which suppressed the generation of frictional heat.

NATM의 미세 구조는 SEM, FT-IR, 인장특성, 그리고 [NCO]/[OH]의 mole %, 입도분석에 의해 측정하였다. 친환경적인 NATM에 관한 관심이 고조됨에 따라 스테인레스 등의 금속코팅에 더욱더 중요한 무용제 도료의 발전을 이끈다. 우리는 스테인레스 스틸의 부식을 방지할 수 있는 NATM(New Austria Tunnel Method)의 수지를 합성하였다. 폴리우레탄과 에폭시로 합성한 혼성 수지는 일반적 NATM 수지와 도료와 비교하여 강도와 내구력이 매우 양호하다. 혼성수지는 폴리올, 에폭시, MDI, 실리콘 계면활성제, 촉매, 가교제, 충전제로 구성된다. 충전제인 fume silica는 경화속도를 가속시킬 뿐만 아니라 열적 장벽으로 물성이 우수함을 나타냈다. NATM 수지의 기계적 특성은 [NCO]/[OH]의 mole%와 fume silica가 증가함에 따라 강도가 증가하였다. 결론적으로 가교제와 fume silica가 함유된 혼성수지의 미세구조는 스테인레스 스틸같은 금속물질의 열경화코팅을 위한 좋은 물질이다.

PTMSP[Poly(1-trimethylsilyl-1-propyne)]에 TEOS (tetraethoxysilane), TMOS (tetramethoxysilane), MTMOS (methyltrimethoxysilane), 그리고 PTMOS (phenyltrimethoxysilane)의 함량을 0, 15, 20, 30 wt%로 달리하여 졸-겔법을 이용하 여 PTMSP-silica 복합막을 제조하였다. PTMSP-silica 복합막의 알콕시실란 함량에 따른 H2, N2의 기체투과도와 N2에 대한 H2의 이상 선택도를 조사하였다. H2와 N2의 투과도는 알콕시실란 함량이 0∼20 wt% 범위에서는 증가하다가 알콕시실란 함 량이 20∼30 wt% 범위에서는 감소하였다. N2에 대한 H2의 이상 선택도는 TEOS와 PTMOS의 함량이 0∼15 wt% 범위에서 는 감소하였으며, 15∼30 wt% 범위에서는 다시 증가하였다. Robeson upper bound와 비교할 때, PTMSP-silica 복합막은 TEOS 함량이 30 wt%, MTMOS 함량이 20 wt% 그리고 PTMOS 함량이 30 wt%에서 투과도와 이상 선택도가 동시에 향상된 것으로 나타났다.

In this study, we synthesize silica-core gold-satellite nanoparticles (SGNPs) for the surface-enhanced Raman scattering (SERS) based sensing applications. They consist of gold satellite nanoparticles (AuNPs) fixed on the silica core nanoparticles, which sizes of AuNPs can be tunned by varying the amount of reactants (growth solution and reducing agent). Their surface plasmon resonance (SPR) properties were characterized by using UV-vis spectroscopy, showing that the growth of AuNPs on silica cores leads to the light absorption in the longer wavelength region. Furthermore, the size increase of AuNPs exhibited the dramatic change in SERS activity due to the formation of hot spots. The optimized SGNPs showing enhancement factor ~3.8x106 exhibited a detection limit of rhodamine 6G (R6G) as low as 10-8M. These findings suggest the importance of size control of SGNPs and their SPR properties to develop highly efficient SERS sensors.

Hydrophilic SiO2 layers were obtained by the atmospheric-pressure plasma treatment. Superhydrophobic SiO2 layers were first deposited by the electrospray deposition method. The electrospunable solution that was prepared based on the solgel method was sprayed on Si (100) substrates. The surface of the electrosprayed SiO2 layers consisted of the agglomeration of nano-sized grains, which led to a very high roughness and revealed a very high contact angle to water droplets over 162˚. After having been exposed to the atmospheric Ar/O2 plasma, the observed superhydrophobicity of the SiO2 layers were greatly changed: a dramatic variation of the water contact angle from 162˚ to 3˚, namely realization of superhydrophillicity. Interestingly, the surface microstructure was almost preserved. According to the XPS analysis, it is more likely that thanks to the plasma exposure, the surface of SiO2 layers will be cleaned in terms of organic species that are hydrophobic-inducing, consequently leading to the hydrophilic nature observed for the plasma-exposed SiO2 layers.

연구에서는 제조된 유무기 나노복합막의 치수안정성, 수소이온 전도능력 및 전기화학성능을 향상시키기 위하여 실리카 나노입자를 선정하였다. 이를 위하여, 소수성 실리카(Aerosil® 812, Degussa)와 친수성 실리카(Aerosil® 380, Degussa)를 각각 술폰화 폴리아릴렌 에테르 술폰(SPAES) 고분자 매트릭스에 도입하였다. 이들 실리카 입자들은 비이온성 분산제인(Pluronics® L64)을 사용함으로써 SPAES 매트릭스에 고르게 분산시킬 수 있었다. 실리카 함량은 최종 제조된 고분자의 미세 구조 및 특성에 중요한 영향을 미치게 된다. 따라서, 본 연구에서는 과량의 실리카가 도입된 나노 복합막의 특성을연구하기 위하여, 실리카의 함량을 5 wt%까지 증가시켰다. 이를 통하여 소수성 실리카가 포함된 나노복합막이 실리카가 도입되지 않은 SPAES막에 비하여, 더 낮은 수소이온 전도도에도 불구하고, 29% 더 높은 전기화학 성능을 나타내는 것을 관찰하였으며, 이는 같은 소수성을 가지고 있는 촉매층과의 접합성 향상에 따른 것으로 나타났다. 이외의 나머지 복합막들 또한실리카가 도입되지 않은 SPAES막에 비하여 높은 성능을 나타냈다.

본 연구에서 고투과도를 갖는 실리카 분리막은 콜로이달 실리카 졸과 고분자형 실리카 졸 두 가지를 DRFF법과SRFF법으로 다공성 금속 지지체 위에 코팅하여 제조되었다. 실리카 졸은 졸-겔법으로 테트라에톡시실란(TEOS)에 의하여 제조되었고, 각각의 졸은 동적광산란법(DLS), 전계방사 주사전자현미경(FE-SEM), 질소 흡착법 등을 이용하여 그 특성을 평가하였다. 다공성 금속 지지체위에 콜로이달 실리카 졸로 중간층을 형성하여 치밀한 구조의 실리카 층을 형성한 후 그 위에 분리층으로 고분자형 실리카 졸을 코팅하여 핀홀을 줄이는 방법으로 기체분리용 분리막을 제조하였다. FE-SEM으로 분리막의코팅 층을 분석한 결과 분리층은 중간층보다 침밀한 구조를 가지고 있음을 확인하였고 기체투과 결과 수소 투과도 (6.63-9.21) × 10-5 mol⋅m-2⋅s-1⋅Pa-1 분포를 보였다.

Silica nano-powder (SNP) is an inorganic material able to provide high-performance in various fields because of its multiple functions. Methods used to synthesize high purity SNP, include crushing silica minerals, vapor reaction of silica chloride, and a sol-gel process using TEOS and sodium silicate solution. The sol-gel process is the cheapest method for synthesis of SNP, and was used in this study. First, we investigated the shape and the size of the silica-powder particles in relation to the variation of HCl and sodium silicate concentrations. After drying, the shape of nano-silica powder differed in relation to variations in the HCl concentration. As the pH of the solution increased, so did the density of crosslinking. Initially, there was NaCl in the SNP. To increase its purity, we adopted a washing process that included centrifugation and filtration. After washing, the last of the NaCl was removed using DI water, leaving only amorphous silica powder. The purity of nano-silica powder synthesized using sodium silicate was over 99.6%.

The friction and wear characteristics of the rubber matrix composites filled with nano sized silica particles were investigated at ambient temperature by pin-on-disc friction test. The volume fraction of silica particles was 19%. The cumulative wear volume and wear rate of these materials on counterpart roughness were determined experimentally. The major failure mechanisms were lapping layers, deformation of matrix, ploughing, debonding of particles, fracture of particles and microcracking by scanning electric microscopy photograph of the tested surface. The cumulative wear volume showed a tendency to increase with increase of sliding distance. The wear rate of these composites tested indicated low value as increasing the sliding distance.

Nanotechnology has become one of the fastest developing technologies and recently applied to a variety of industries. Thus, increasing number of nano materials including various nanoparticles would be discharged into wastewater and consequently entering a biological wastewater treatment process. However, the impact of the nano particles on biological wastewater treatment has not been estimated intensively. In this research, we investigated the effect of silica nanoparticle on the oxygen uptake rates (OURs) of activated sludge used in a conventional wastewater treatment process. The inhibition (%) values were estimated from the results of OURs experiments for the silica nanoparticles with various sizes of 10-15, 45-50, and 70-100 nm and concentrations of 50, 250, and 500 ppm. As results, the inhibition value was increased as the size of silica nano particles decreased and the injected concentration increased. The maximum inhibition value was investigated as 37.4 % for the silica nanoparticles with the size of 45-50 nm and concentration of 50 ppm. Additionally, the effect of size and concentration on the inhibition should be considered cautiously in case that the aggregation of particles occurred seriously so that the size of individual particles was increased in aquatic solution.

In this study, diatomite based materials were investigated as a support filter for silica particle coating. Thesilica sol for coating was synthesized by a stöber process. The diatomite support was dry-pressed at 10 MPa and sin-tered at 1200˚C for 1 hour. The coating sol was prepared as a mixture of EtOH and silica sol. The diatomite supportwas coated by a dip-coating process. Silica coated diatomite filter was sintered at 1000~1200˚C for 1 hour. The largestpore size was decreased with increasing concentration ratio of coating sol. The gas and water permeability of silicacoated diatomite decreased with increasing of concentration ratio of the coating sol.

The characteristics of abrasive wear of the rubber matrix composites filled with nano sized silica particles were investigated at ambient temperature by pin-on-disc friction test. The range of volume fraction of silica particles tested are between 11% to 25%. The cumulative wear volume and friction coefficient of these materials on particle volume fraction were determined experimentally. The major failure mechanisms were lapping layers, deformation of matrix, ploughing, deboding of particles and microcracking by scanning electric microscopy photograph of the tested surface. The cumulative wear volume showed a tendency to increase nonlinear with increase of sliding distance. As increasing the silica particles of these composites indicated higher friction coefficient.

The quartz glasses were prepared by fumed silica powders sintering method at , , in air and the effect of sintering temperature on their properties were investigated. The X-ray diffraction pattern, the OH concentration, the light transmittance, the apparent porosity and the density were analyzed. The transparent quartz glass were obtained above . The OH-group and macroscopic pores were removed above and highest density and light transmittance were obtained at .

Superhydrophobic SiO2 layers with a micro-nano hierarchical surface structure were prepared. SiO2 layers depositedvia an electrospray method combined with a sol-gel chemical route were rough on the microscale. Au particles were decoratedon the surface of the microscale-rough SiO2 layers by use of the photo-reduction process with different intensities (0.11-1.9 mW/cm2) and illumination times (60-240 sec) of ultraviolet light. With the aid of nanoscale Au nanoparticles, this consequentlyresulted in a micro-nano hierarchical surface structure. Subsequent fluorination treatment with a solution containingtrichloro(1H,2H,2H,2H-perfluorooctyl)silane fluorinated the hierarchical SiO2 layers. The change in surface roughness factorwas in good agreement with that observed for the water contact angle, where the surface roughness factor developed as ameasure needed to evaluate the degree of surface roughness. The resulting SiO2 layers revealed excellent repellency towardvarious liquid droplets with different surface tensions ranging from 46 to 72.3mN/m. Especially, the micro-nano hierarchicalsurface created at an illumination intensity of 0.11mW/cm2 and illumination time of 60 sec showed the largest water contactangle of 170o. Based on the Cassie-Baxter and Young-Dupre equations, the surface fraction and work of adhesion for the micro-nano hierarchical SiO2 layers were evaluated. The work of adhesion was estimated to be less than 3×10−3N/m for all the liquiddroplets. This exceptionally small work of adhesion is likely to be responsible for the strong repellency of the liquids to themicro-nano hierarchical SiO2 layers.

본 연구에서는 CVD법으로 세라믹 막을 제조하였다. 튜브의 α-Al2O3 지지체 위에 Ga 염이 첨가된 γ-Al2O3를 코팅하였고, 실란화합물인 tetramethylorthosilane (TMOS) 를 650℃에서 화학적 기상 증착법으로 막에 증착하였다. 제조된 세라믹 막을 사용하여 수소, 질소, 이산화탄소, 메탄의 단일조성 기체투과 실험을 600℃에서 시행하였다. Ga 염 비첨가 시, 600℃ 수분 처리 실험의 H2/N2 선택도가 926에서 829로 감소한 반면, Ga 염 첨가 시에는 910에서 904로 안정하였다. 이 결과를 통해, 막에 금속염을 첨가하여 제조한 막이 수분 안정성을 향상시킴을 확인하였다.

The quartz glasses were prepared by sintering of fumed silica powders and the effect of OH concentration on their surface on sintering was studied. Through the firing process, the fumed silica was crystallized from 1180 to region. The amount of hydroxyl group decreased with increase in calcination temperature and consequently the crystallization was prevented. A transparent quartz glass was obtained from fumed silica, previously calcined at , by the sintering at for 1 h.

Hollow silica spheres were prepared by spray drying of precursor solution of colloidal silica. The precursor solution is composed of 10-20 nm colloidal silica dispersed in a water or ethanol-water mixture solvent with additives of tris hydroxymethyl aminomethane. The effect of pH and concentrations of the precursor and additives on the formation of hollow sphere particles was studied. The spray drying process parameters of the precursor feeding rate, inlet temperature, and gas flow rate are controlled to produce the hollow spherical silica. The mixed solvent of ethanol and water was preferred because it improved the hollowness of the spheres better than plain water did. It was possible to obtain hollow silica from high concentration of 14.3 wt% silica precursor with pH 3. The thermal conductivity and total solar reflectivity of the hollow silica sample was measured and compared with those values of other commercial insulating fillers of glass beads and TiO2 for applications of insulating paint, in which the glass beads are representative of the low thermal conductive fillers and the TiO2 is representative of infrared reflective fillers. The thermal conductivity of hollow silica was comparable to that of the glass beads and the total solar reflectivity was higher than that of TiO2.

PURPOSES: The purpose of this study is to compare the alkali-silica reactivity for mortar bar and concrete prism specimens using crushed aggregates of 5 types in Korea. And the alkali-silica reactivity for those aggregates are measured by chemical test method. METHODS: The alkali-silica reactivity for those aggregates was measured by chemical test method of KS F 2545, mortar-bar test of KS F 2546, accelerated mortar-bar test method of ASTM C 1260 and concrete prism test method of ASTM C 1293, relatively. RESULTS: The alkali-silica reactivity for those aggregates was verified by chemical test of KS F 2546 and accelerated mortar-bar test of ASTM C 1260. However, it was not by mortar-bar test of KS F 2546 and concrete prism test of ASTM C 1293. CONCLUSIONS: The above results showed that relationship among the four test methods were very low. The results from 3 types of test methods using cement-aggregate combinations appeared to be different. Because the environmental conditions of test methods for measuring the alkali-silica reactivity such as equivalent alkali content(external source), humidity, temperature, and times were different though the aggregates were same. Moreover, alkali-silica reactivity showed the biggest impact when alkalis were supplied form outside and exposed to environmental conditions. The accelerated mortar-bar test method seems to be most appropriate test method for concrete structures exposed to alkali environment.

A chemical process involves polymerization within microspheres, whereas a physical process involves the dispersion of polymer in a nonsolvent. Nano-sized monodisperse microspheres are usually prepared by chemical processes such as water-based emulsions, seed suspension polymerization, nonaqueous dispersion polymerization, and precipitation polymerizations. Polymerization was performed in a four-necked, separate-type flask equipped with a stirrer, a condenser, a nitrogen inlet, and a rubber stopper for adding the initiator with a syringe. Nitrogen was bubbled through the mixture of reagents for 1 hr. before elevating the temperature. Functional silane (3-mercaptopropyl)trimethoxysilane (MPTMS) was used for the modification of silica nanoparticles and the self-assembled monolayers obtained were characterized by X-ray photoelectron spectroscopy (XPS), laser scattering system (LSS), Fourier transform infrared spectroscopy (FTIR), scanning electron microscopy (SEM), elemental analysis (EA), and thermogravimetric analysis (TGA). In addition, polymer microspheres were polymerized by radical polymerization of γ-mercaptopropyl modified silica nanoparticles (MPSN) and acrylamide monomer via precipitation polymerization; then, their characteristics were investigated. From the elemental analysis results, it can be concluded that the conversion rate of acrylamide monomer was 93% and that polyacrylamide grafted to MPSN nanospheres via the radical precipitation polymerization with AAm in ethanol solvent. The microspheres were successfully polymerized by the 'graft from' method.