The preparation of powder by the Chemical Vapor Synthesis process (CVS) was studied using the liquid metal organic precursor (TTIP). The residence time and the collection methods were considered as main processing variables through the experiments. The CVS equipment consisted of a micropump and a flashvaporizer, a tube furnace and a tubular collection device. The synthesis was performed at with various sets of collection zone. The residence time and the total system pressure were controlled in the range of 3~20 ms and 10 mbar, respectively. Nitrogen adsorption, X-ray diffraction and electron microscopy were used to determine particle size, specific surface area and crystallographic structure. The grain size of the as-prepared powder was in the range of 2~8 nm for all synthesis parameters and the powder exhibited only little agglomeration. The relationship between particle characteristics and the processing variables is reviewed based on simple growth model.

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