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검출력 향상된 자기상관 공정용 관리도의 강건 설계 : 반도체 공정설비 센서데이터 응용 KCI 등재
Power Enhanced Design of Robust Control Charts for Autocorrelated Processes : Application on Sensor Data in Semiconductor Manufacturing
한국산업경영시스템학회지
(Journal of Society of Korea Industrial and Systems Engineering)
Vol. 34 No. 4 (2011.12)
pp.57-65
pp.57-65
한국산업경영시스템학회
(Society of Korea Industrial and Systems Engineering)
초록
Monitoring autocorrelated processes is prevalent in recent manufacturing environments. As a proactive control for manufacturing processes is emphasized especially in the semiconductor industry, it is natural to monitor real-time status of equipment throug
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