Interest in the measurement of siloxane which reduces energy efficiency of biogas, has increased with its market extend. Even though the impinger absorption method takes long sampling time of 2-3 hours and need a complicated equipment, it has been typically used for the sampling method of siloxane. This study was conducted to apply the gas bag sampling method with tedlar bag and aluminium bag for improving the method of siloxane sampling. To compare efficiencies of siloxane sampling, the manufactured gas, landfill gas, and digestion gas were used as sample gases. According to the result, materials of gas bags did not cause measurement error and there was no loss of siloxane by adsorption on the inner surface of gas bag. The result of D4 calibration in the tedlar bag, showed higher than 0.99 in the coefficient of determination. In case of digestion gas, the analysis results of two samples collected by the tedlar bag and the impinger absorption were almost same. The differences of analysis result between landfill gas and digestion gas were considered due to the short sampling time and the absence of gas storage tank.