Photoresist Stripper 폐액으로부터 감압 증류에 의한 1-hydroxyethylpiperazine와 methyl diglycol 회수

김재경; 박명준; 이문용; 구기갑

논문 상세보기

Photoresist Stripper 폐액으로부터 감압 증류에 의한 1-hydroxyethylpiperazine와 methyl diglycol 회수 KCI 등재

Recovery of 1-hydroxyethylpiperazine and Methyl Diglycol from a Waste Photoresist Stripper by Vacuum Distillation

김재경, 박명준, 이문용, 구기갑

언어KOR
URLhttps://db.koreascholar.com/Article/Detail/242512

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한국폐기물자원순환학회지 (Journal of Korea Society of Waste Management)

제30권 제6호 (2013.09)
pp.520-528

한국폐기물자원순환학회 (Korea Society Of Waste Management)

초록

For the reclamation of HEP (1-hydroxyethylpiperazine) and MDG (methyl diglycol) from waste photoresist stripper, lab-scale experiments with a packed bed vacuum column were carried out. Purity of recovered solution mixture of HEP and MDG was measured to be 99.3% and recovery yield was to be 65%. Those results confirm that some organic solvents reclaimed from waste PR stripper satisfies the product specification required for the formulation of photoresist stripper.

키워드

Waste solvent recovery Photoresist stripper Vacuum distillation HEP (1-hydroxyethylpiperazine)MDG(methyl diglycol)

저자

김재경(서강대학교 화공생명공학과) | Jae-Kyeong Kim
박명준((주)코렉스) | Myung-Jun Park
이문용(영남대학교 화학공학부) | Moonyong Lee
구기갑(서강대학교 화공생명공학과) | Kee-Kahb Koo Corresponding author

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