For the reclamation of HEP (1-hydroxyethylpiperazine) and MDG (methyl diglycol) from waste photoresist stripper, lab-scale experiments with a packed bed vacuum column were carried out. Purity of recovered solution mixture of HEP and MDG was measured to be 99.3% and recovery yield was to be 65%. Those results confirm that some organic solvents reclaimed from waste PR stripper satisfies the product specification required for the formulation of photoresist stripper.