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pp.157-163
To ceramic mm, SiO2 and Al2O3, coated on pure Fe and stainless steel(SUS41O) by RF magnetron sputtering, the adherence between mm and substarte was studied. The adherence index (χ) was determined by the measure of micro hardness test. Also, the corrosion resistance on oxide coatings was studied using electrochemical measurement. The main results obtained are as the following: 1) In the micro-hardness test, with 1μm thickness mm, it has only one the value of χ. Above 2μthickness fIlm, however, get another value of χas the cracks in fIlm. 2) The oxide fIlm adhere well on the mild materials such as pure steel than high intensity materials like stainless. 3) Alumina(Al2O3) coated materials have better corrosion resistance than silica(SiO2)coated materialsterials
