Thin films of Eu(TTA)3(phen), which was known to show red-light emitting properties, were deposited under various deposition condition. The thickness, surface morphology, and photoluminescence(PL) were measured with α-step profiler, Atomic Force Microscopy(AFM), and PL measurement apparatus. It was found that the thickness of Eu(TTA)3(phen) film can be controlled precisely by adjusting the amounts of Eu(TTA)3(phen) in the boat. As the thickness of these films increases, the surface roughness also increases. A structure of Al/Eu(TTA)3(phen)(850a)/TPD(600a)/ITO was fabricated, Electroluminescence(EL) spectrum of which shows the peak at the wavelength of 618nm.