논문 상세보기

에폭시 본딩을 이용한 자기변형 박막 작동기의 거동 KCI 등재

Behavior of Magnetostrictive Thin Film Actuator using Epoxy Bonding

  • 언어KOR
  • URLhttps://db.koreascholar.com/Article/Detail/291741
구독 기관 인증 시 무료 이용이 가능합니다. 4,000원
한국기계기술학회지 (Journal of the Korean Society of Mechanical Technology)
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

Magnetostrictive actuator is fabricated with epoxy bonding method instead of sputtering method in this study. Fabrication process and experimental measurement method for magneto-mechanical characteristics is proposed. For the design of highly flexible magnetostrictive actuator, TbDyFe epoxy bonding with SU-8 substrate is adopted. The fabrication process for SU-8 substrate and the epoxy bonding is suggested and magnetostrictive behavior is investigated. Variable magnetic field is applied to measure the various magnetostrictive characteristics and magnetostriction is measured with different waves and different magnitude of magnetic field.

목차
Abstract
 1. 서론
 2. 자기변형 작동기의 제작
  2.1 자기변형 작동기 제작 배경
  2.2 자기변형 작동기의 제작
 3. 자기변형 작동기의 실험
  3.1 박막 두께 및 자화 측정
  3.2 자기변형 측정
 4. 결론
 References
저자
  • 전찬열(중부대학교 자동차관리학과) | Chan Yeal Jeon