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pp.211-217
A ZrO2 coating solution containing ZrO2 photo-catalysis, which is transparent in visible light, was prepared by the hydrolysis of alkoxide, and thin films on the SiO2 glass substrate were formed in a dipcoating method. These thin films were heat-treated at temperatures ranging from 250˚C-800˚C and their characteristics were subjected to thermal analysis, XRD, spectrometry, SEM, EDS, contact angle measurement, and AFM. Tetragonal ZrO2 phase was found in the thin film heat treated at 450˚C, and anatase TiO2 phase was detected in the thin film heat-treated at 600˚C and above. The thickness of the films was approximately 300 nm, and the roughness was 0.66 nm. Thus, the film properties are excellent. The films are super hydrophilic with a contact angle of 4.0˚; moreover, they have self-cleaning effect due to the photo catalytic property of anatase TiO2.
