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이온빔 조사방법을 이용한 SiOF 기판상의 수평배향 엘시디 표시소자의 특성에 관한 연구 KCI 등재

Study of Homogeneous Alignment LCD Device using Ion-beam Irradiation method on SiOF Substrates

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  • URLhttps://db.koreascholar.com/Article/Detail/298860
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한국기계기술학회지 (Journal of the Korean Society of Mechanical Technology)
한국기계기술학회 (Korean Society of Mechanical Technology)
초록

Nematic liquid crystal (NLC) alignment effects on SiOF layers via ion-beam(IB) irradiation for four types of incident energy were successfully studied. The effect of fluorine addition on silicon oxide film properties as a function of SiOF₄/O₂gas flow ration was investigated. The SiOF thin film exhibits good chemical and the thermal stability of the SiOF thin film were sustained as function of the NLC alignment until 200℃. Also, the response-time characteristics of aligned LCD based on SiOF film were studied.

목차
1. INTRODUCTION
 2. EXPERIMENTS
 3. RESULTS AND DISC USSIO N
 4. CONCLUSIONS
 Acknowledgements
 References
저자
  • 조명현(Member, Seoil University) | Myung-Hyun Cho Corresponding author
  • 김원배(SongWon University) | Won- Bae Kim
  • 이호영(Chodang University) | Ho-Young Lee