In order to secure competitiveness of companies in the semiconductor industry, state management of equipment is one of the most important key factors. Particularly, after carrying out preventive maintenance (PM) work to maintain the best equipment condition, process reliability inspection is carried out. This work must be performed manually by the intervention of the operator. This inspection work is becoming more and more difficult due to the difficulty of the manufacturing worker, the increase of the simple repetitive workload, and the increase of the inspection items for the engineer, as the condition and the procedure continuously change as the semiconductor scaling down. Therefore, we would like to carry out an empirical study on the construction of an automatic inspection system in order to carry out the more reliable and efficient inspection procedure by eliminating the problems and unreasonableness of the past based on the investigation and analysis of the work procedures and conditions of the existing manual method.

Abstract
 1. 서 론
 2. 이론적 고찰
  2.1 설비보전
  2.2 반도체 제조 공정
  2.3 제조실행시스템(MES)
 3. 수작업 검사 시스템 분석
  3.1 수작업 검사 절차 현황
  3.2. 수작업 검사 문제점 및 대책
 4. 자동검사 시스템 구축
  4.1 자동검사 시스템 개요
  4.2 자동검사 및 연계 시스템 설계
  4.3 기준정보 및 실행 Module 설계
  4.4 자동검사 시스템 구축 및 적용
 5. 결론
 6. References

• 임철(SK하이닉스(주)) | Cheol Im
• 박재현(한국산업인력공단) | Jea-Hyun Park
• 송관배(명지대학교 산업경영공학과) | Kwan-Bae Song