Cleanroom could be largely classified into industrial cleanroom that can be contaminated by particlesand bio-cleanroom that can be contaminated by biological particles. Electrical manufacturing companies such as precision machines and electrical parts essentially have industrial cleanroom facilities and clean technologies to produce defects free products due to particles.Industrial cleanroom should be controlled in respect of 4M1E to prevent from foreign materials of submicro unit and to keep out contamination sources from outside. In this paper, a concept for a quantitative methodology to measure the particles from running components was suggested by combining both newly making clean booth such as wear tester and laser particle counter.

1. 서론
 2.상용중인 마모 시험기 및 파티클 측정기
 3. 개념적인 파티클 측정기 개발
 4. 결론 및 추가연구
 참고문헌

• Sung HoChang(Kumoh National Institute of Technology Graduate School of Consulting) | 장성호
• Sang Han Yoon(Kumoh National Institute of Technology Graduate School of Consulting) | 윤상한
• Kwonhak Noh(LG Display) | 노권학
• Jonghwan Lee(Kumoh National Institute of Technology Graduate School of Consulting) | 이종환