It is essential for medical equipment sterilization operations to prevent infections in the hospital. The low temperature plasma sterilization method using oxygenated water has the advantage of high efficiency and short time in sterilizing processes. However, a chamber which can hold constant vacuum condition without deformation is essential in the sterilizing system to apply plasma sterilization technique. In this study, therefore, the vacuum chamber is developed for 70 liter plasma sterilization device. The vacuum chamber is designed by checking the thickness, edge fillet value and rib of chamber through each simulation. And the performance of the chamber is investigated by vibrational modes and heat stress simulation. The prototype vacuum chamber is tested by experiments to verify the safety and efficiency for 0.1 Torr vacuum, and the result shows the expected vacuum level and displacement.

ABSTRACT
 1. 서 론
 2. 진공 챔버의 설계 및 해석
  2.1 진공 챔버의 두께 설정
  2.2 진공 챔버의 모서리 형상 설정
  2.3 진공 챔버의 보강대 설정
 3. 진공 챔버의 성능 평가
  3.1 진공 챔버의 진동 해석
  3.2 진공 챔버의 열응력 해석
 4. 실험 및 결과 고찰
  4.1 실험 장치 및 방법
  4.2 실험 결과 및 고찰
 5. 결 론
 References

• 신준(Gangneung-wonju National University, Mechanical & Biomedical Eng.) | Joon Shin Corresponding Author
• 이태연(Gangneung-wonju National University, Mechanical & Biomedical Eng.) | Tae-Yeon Lee