Silicon carbide with aluminium oxide was used to remove the sulphur hexafluoride (SF6) gas using microwave irradiation. The destruction and removal efficiencies (DREs) of SF6 were studies as a function of various decomposition temperatures and microwave powers. The decomposition of SF6 gas was analyzed using GC-TCD. XRD (X-ray powder diffraction) and XRF (X-ray Fluorescence Spectrometer) were used to characterize the properties of aluminum oxide. DREs of SF6 were increased as the microwave powers were increased. Additive aluminium oxide on SiC increased the removal efficiencies and decreased the decomposition temperature. The XRD results show that the γ-Al2O3 was transformed to α-Al2O3 during SF6 decomposition by microwave irradiation. It was found that the best material to control SF6 was SiC with Al2O3 30 wt% in consideration of microwave energy consumption and SF6 decomposition rate.

Abstract
 1. 서 론
 2. 재료 및 방법
 3. 결과 및 고찰
  3.1. 산화알루미늄 함량 및 분해온도에 따른 SF6 분해
  3.2. 마이크로파 조사에 따른 SiC-Al2O3(30)의 온도와효율의 관계
  3.3. 마이크로파조사에 따른 산화알루미늄의 효과
  3.4. 마이크로파 조사에 따른 산화알루미늄의 물성분석
 4. 결 론
 참 고 문 헌

• 최성우(계명대학교 환경과학과) | Sung-woo Choi (Department of Environmental Science and Engineering, Keimyung University) Corresponding author