논문 상세보기

Fabrication of Aligned Nano Patterns on HfZnO based on the Imprinting Method for Liquid Crystal Display KCI 등재

임프린팅법을 이용한 HfZnO 위의 정렬된 나노패턴 제작과 액정표시소자의 응용

Byeong-Yun Oh
  • 언어ENG
  • URLhttps://db.koreascholar.com/Article/Detail/377937
구독 기관 인증 시 무료 이용이 가능합니다. 4,000원
한국기계항공기술학회지(구 한국기계기술학회지) (Journal of the Korean Society of Mechanical and Aviation Technology)
한국기계항공기술학회(구 한국기계기술학회) (Korean Society of Mechanical Technology)
초록

Abstract We demonstrate convenient alignment technologies using imprinting lithography with sol-gel process. The aligned nano pattern is fabricated on a silicon wafer by laser interference lithography. For conformal imprinting process, aligned nano pattern was transferred onto the polydimethylsiloxane (PDMS). Using a PDMS sheet with aligned nano pattern, aligned nano pattern was created onto the sol-gel driven hafnium zinc oxide by imprinting lithography. The process was conducted at annealing temperatures of 150 °C. The obtained pattern on the HfZnO film acted as a guide for aligning liquid crystal (LC) molecules. The geometric restriction induced by aligned pattern leads to LC alignment along to the aligned nano pattern. The combination of imprint lithography and solution-processed inorganic materials proved good alternative of LC alignment technique.

키워드
Imprinting method임프린팅 법HfZnO하프늄징크옥사이드Liquid crystals display액정표시장치Liquid crystal alignment액정 배향Atomic force microscopy원자력 현미경
목차
ABSTRACT
1. Introduction
2. Experiments
3. Result and Discussion
4. Conclusion
References
저자
  • Byeong-Yun Oh(BMC Co., Ltd.) | 오병윤 Corresponding Author