Homogeneous multicomponent indium gallium zinc oxide (IGZO) ceramics for transparent electrode targets are prepared from the oxides and nitrates as the source materials, and their properties are characterized. The selected compositions were In2O3:Ga2O3:ZnO = 1:1:2, 1:1:6, and 1:1:12 in mole ratio based on oxide. As revealed by X-ray diffraction analysis, calcination of the selected oxide or nitrides at 1200oC results in the formation of InGaZnO4, InGaZn3O6, and InGaZn5O8 phases. The 1:1:2, 1:1:6, and 1:1:12 oxide samples pressed in the form of discs exhibit relative densities of 96.9, 93.2, and 84.1%, respectively, after sintering at 1450oC for 12 h. The InGaZn3O6 ceramics prepared from the oxide or nitrate batches comprise large grains and exhibit homogeneous elemental distribution. Under optimized conditions, IGZO multicomponent ceramics with controlled phases, high densities, and homogeneous microstructures (grain and elemental distribution) are obtained.

Abstract
1. 서 론
2. 실험방법
3. 결과 및 고찰
    3.1 IGZO계 합성 분말
    3.2 IGZO계 소결체
4. 결 론
References

• 이현권(금오공과대학교 신소재공학부) | Hyun-Kwun Lee (School of Materials Science and Engineering, Kumoh National Institute of Technology)
• 윤지혜(금오공과대학교 신소재공학부) | Ji-Hye Yoon (School of Materials Science and Engineering, Kumoh National Institute of Technology)
• 조경식(금오공과대학교 신소재공학부) | Kyeong-Sik Cho (School of Materials Science and Engineering, Kumoh National Institute of Technology) Corresponding Author