In this paper, we investigated the effect of the passivation stack with Al2O3, hydrogenated silicon nitride (SiNx:H) stack and Al2O3, silicon oxynitride (SiONx) stack in the n type bifacial solar cell on monocrystalline silicon. SiNx:H and SiONx films were deposited by plasma enhanced chemical vapor deposition on the Al2O3 thin film deposited by thermal atomic layer deposition. We focus on passivation properties of the two stack structure after laser ablation process in order to improve bifaciality of the cell. Our results showed SiNx:H with Al2O3 stack is 10 mV higher in implied open circuit voltage and 60 μs higher in minority carrier lifetime than SiONx with Al2O3 stack at Ni silicide formation temperature for 1.8% open area ratio. This can be explained by hydrogen passivation at the Al2O3/Si interface and Al2O3 layer of laser damaged area during annealing.

Abstract
1. 서 론
2. 실험 방법
    2.1 후면 패시베이션 특성 확인
3. 결과 및 고찰
    3.1 레이저 공정 조건
    3.2 개방 비와 패시베이션 효과 확인
    3.3 SiNx, SiONx 박막 특성 비교
4. 결 론
References

• 김기륜(충남대학교 에너지기술과학 대학원) | Kiryun Kim (Graduate School of Energy Science and Technology, Chungnam National University)
• 장효식(충남대학교 에너지기술과학 대학원) | Hyo Sik Chang (Graduate School of Energy Science and Technology, Chungnam National University) Corresponding author