The SnSe single crystal shows an outstanding figure of merit (ZT) of 2.6 at 973 K; thus, it is considered to be a promising thermoelectric material. However, the mass production of SnSe single crystals is difficult, and their mechanical properties are poor. Alternatively, we can use polycrystalline SnSe powder, which has better mechanical properties. In this study, surface modification by atomic layer deposition (ALD) is chosen to increase the ZT value of SnSe polycrystalline powder. SnSe powder is ground by a ball mill. An ALD coating process using a rotary-type reactor is adopted. ZnO thin films are grown by 100 ALD cycles using diethylzinc and H2O as precursors at 100oC. ALD is performed at rotation speeds of 30, 40, 50, and 60 rpm to examine the effects of rotation speed on the thin film characteristics. The physical and chemical properties of ALD-coated SnSe powders are characterized by scanning and tunneling electron microscopy combined with energy-dispersive spectroscopy. The results reveal that a smooth oxygenrich ZnO layer is grown on SnSe at a rotation speed of 30 rpm. This result can be applied for the uniform coating of a ZnO layer on various powder materials.

Abstract
1. 서 론
2. 실험 방법
3. 결과 및 고찰
4. 결 론
References

• 정명준(서울과학기술대학교 신소재공학과) | Myeong Jun Jung (Department of Materials Science and Engineering, Seoul National University of Science and Technology)
• 윤예준(서울과학기술대학교 신소재공학과) | Ye Jun Yun (Department of Materials Science and Engineering, Seoul National University of Science and Technology)
• 변종민(서울과학기술대학교 신소재공학과/서울과학기술대학교 분말기술연구소) | Jongmin Byun (Department of Materials Science and Engineering, Seoul National University of Science and Technology/The Institute of Powder Technology, Seoul National University of Science and Technology)
• 최병준(서울과학기술대학교 신소재공학과/서울과학기술대학교 분말기술연구소) | Byung Joon Choi (oul National University of Science and Technology/The Institute of Powder Technology, Seoul National University of Science and Technology) Corresponding Author