To improve ferroelectric properties of PZT, many studies have attempted to fabricate dense PZT films. The AD process has an advantage for forming dense ceramic films at room temperature without any additional heat treatment in low vacuum. Thick films coated by AD have a higher dielectric breakdown strength due to their higher density than those coated using conventional methods. To improve the breakdown strength, glass (SiO2-Al2O3-Y2O3, SAY) is mixed with PZT powder at various volume ratios (PZT-xSAY, x = 0, 5, 10 vol%) and coating films are produced on silicon wafers by AD method. Depending on the ratio of PZT to glass, dielectric breakdown strength and energy storage efficiency characteristics change. Mechanical impact in the AD process makes the SAY glass more viscous and fills the film densely. Compared to pure PZT film, PZT-SAY film shows an 87.5% increase in breakdown strength and a 35.3 % increase in energy storage efficiency.

Abstract
1.서 론
2. 실험방법
3. 결과 및 고찰
4.결 론
References

• 김삼정(인하대학교 신소재공학과) | Samjeong Kim (Department of Materials Science and Engineering, Inha University)
• 임지호(인하대학교 신소재공학과) | Ji-Ho Lim (Department of Materials Science and Engineering, Inha University)
• 정대용(인하대학교 신소재공학과) | Dae-Yong Jeong (Department of Materials Science and Engineering, Inha University) Corresponding author