Flow Analysis of thin Film Evaporator for the Production of Ultra-High Purity TDMAS(Trisdimethylaminosilane)
The purpose of flow analysis is to develop a simple CFD analysis model to develop a heat transfer analysis model including transient heat transfer characteristics, especially phase change, of thin film evaporators. The simple analytical model focuses on the evaporation phase change. To reduce the computational cost, the shape was simplified to two dimensions, and the simulation time was set short with a focus on simulating the phase change phenomenon. In the future, based on this analysis model, we will develop an analysis model for simulating not only vaporization but also liquefaction, that is, transient distillation phenomenon, according to the shape of the thin film distillation device.