The sintering shrinkage behaviors of low temperature cofired ceramics (LTCC) and resistors were compared using commercial LTCC and thick-film resistor pastes, and factors influencing the camber of cofired resistor/LTCC bi-layers were also investigated. The onset of sintering shrinkage of the resistor occurred earlier than that of LTCC in all resistors, but the end of sintering shrinkage of the resistor occurred earlier or later than that of LTCC depending on the composition of the resistor. The sintering shrinkage end temperature and the sintering shrinkage temperature interval of the resistor increased as the RuO2/glass volume ratio of the resistor increased. The camber of cofired resistor/LTCC bi-layers was obtained using three different methods, all of which showed nearly identical trends. The camber of cofired resistor/LTCC bi-layers was not affected by either the difference in linear shrinkage strain after sintering between LTCC and resistors or the similarity of sintering shrinkage temperature ranges of LTCC and resistors. However, it was strongly affected by the RuO2/glass volume ratio of the resistor. The content of Ag and Pd had no effect on the sintering shrinkage end temperature or sintering shrinkage temperature interval of the resistor, or on the camber of cofired resistor/LTCC bi-layers.

1. 서 론
2. 실험 방법
    2.1. LTCC와 저항 페이스트의 선정
    2.2. 저항 페이스트의 무기물 조성 분석
    2.3. LTCC와 저항의 소결 수축 거동 측정
    2.4. 저항의 유리전이온도(glass transition temperature,Tg) 측정
    2.5. 저항/LTCC 이중층의 동시 소성에 의한 캠버 측정
3. 결과 및 고찰
    3.1. 저항 페이스트 무기물 입자의 종류와 함량
    3.2. LTCC와 저항의 소결 수축거동
    3.3. 동시 소성된 저항/LTCC 이중층의 캠버
4. 결 론
Acknowledgement
References

• 홍옥연((주)알엔투테크놀로지 개발팀) | Ok Yeon Hong (R&D Team, RN2 Technologies, Gangneung 25451, Republic of Korea)
• 민석홍(강릉원주대학교 신소재금속공학과) | Seok-Hong Min (Department of Advanced Metal and Materials Engineering, Gangneung-Wonju National University, Gangneung 25457, Republic of Korea) Corresponding author