The segmentation of activated components is considered as a one of the most important processes in decommissioning. The activated components, such as reactor vessel and reactor vessel internals, are exposed to neutron from the nuclear fuel and classified to intermediate, low, and very low-level wastes. As it is expected, the components, which are closed to nuclear fuel, exhibit higher degree of specific activity. After the materials were exposed to neutrons, their original elements transform to other nuclides. The primary nuclides in activated stainless steel are 55Fe, 63,59Ni, 60Co, 54Mn, etc. The previous study indicates that the specific activity of individual nuclide is strongly depends on the material compositions and impurities of the original materials. The 59Co is the one of the most important impurities in stainless steel and carbon steel. In this paper, the relationship between individual nuclides in activation analysis of activated components was studied. The systematic study on specific activity of primary nuclides will be discussed in this paper to understand the activation tendency of the components.