Nano-oxide dispersion–strengthened (ODS) superalloys have attracted attention because of their outstanding mechanical reinforcement mechanism. Dispersed oxides increase the material’s strength by preventing grain growth and recrystallization, as well as increasing creep resistance. In this research, atomic layer deposition (ALD) was applied to synthesize an ODS alloy. It is useful to coat conformal thin films even on complex matrix shapes, such as nanorods or powders. We coated an Nb-Si–based superalloy with TiO2 thin film by using rotary-reactor type thermal ALD. TiO2 was grown by controlling the deposition recipe, reactor temperature, N2 flow rate, and rotor speed. We could confirm the formation of uniform TiO2 film on the surface of the superalloy. This process was successfully applied to the synthesis of an ODS alloy, which could be a new field of ALD applications.

1. Introduction
2. Experimental
3. Results and Discussion
    3.1. TiO2 박막 증착 조건 탐색
    3.2. TiO2 박막의 미세구조 및 화학적 분석
4. Conclusion
Conflict of Interest Declaration
Author Information
Acknowledgement
References

• 박지영(서울과학기술대학교 신소재공학과) | Ji Young Park (Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea)
• 은수민(서울과학기술대학교 신소재공학과) | Su Min Eun (Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea)
• 변종민(서울과학기술대학교 신소재공학과, 서울과학기술대학교 분말기술연구소) | Jongmin Byun (Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea, The Institute of Powder Technology, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea)
• 최병준(서울과학기술대학교 신소재공학과, 서울과학기술대학교 분말기술연구소) | Byung Joon Choi (Department of Materials Science and Engineering, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea, The Institute of Powder Technology, Seoul National University of Science and Technology, Seoul 01811, Republic of Korea) Corresponding author