Transparent and conducting SnO2 and SnO2/Ag/SnO2 (SAS) films were deposited on glass substrates by magnetron sputtering at room temperature. The effect of the SnO2 target power and Ag interlayer on the visible transmittance and electrical properties of the film was considered. Although all the SnO2 films had an amorphous structure under all sputtering power conditions, SnO2 films deposited at a target power of 60 W showed a lower resistivity of 2.25 Ω cm and a lower surface roughness of 1.4 nm. The average visible transmittance also varied with target power conditions. The average visible transmittance increased from 73.7 % (40 W) to 76.3 % (60 W) and then decreased to 73.2 % (80 W). When all films were compared, it was found that the SnO2 films deposited at 60 W had a higher figure of merit of 2.98 × 10-7 Ω-1. In addition, the SnO2 films with a Ag 10 nm interlayer showed a lower resistivity of 4.28 × 10-5 Ω cm and a visible transmittance of 70.58 %. The Ag interlayer in the SnO2 films increased the figure of merit to 7.88 × 10-3 without substrate heating or post-deposition annealing. The observed results confirm that the optical and electrical properties of SnO2 films can be enhanced by optimizing the sputtering target power condition and the thickness of the Ag interlayer, respectively.

Abstract
1. 서 론
2. 실험 방법
3. 결과 및 고찰
    3.1. SnO2 타겟 인가 전력 조건에 따른 전기적, 광학적특성
    3.2. SnO2/Ag/SnO2 삼층 박막의 전기적, 광학적 특성
4. 결 론
Acknowledgement
References
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• 김지호(울산대학교 첨단소재공학부) | Jiho Kim (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea)
• 구휘근(울산대학교 첨단소재공학부) | Hwi-Geun Koo (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea)
• 최용진(울산대학교 첨단소재공학부) | Yong-Jin Choi (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea)
• 공영민(울산대학교 첨단소재공학부) | Young-Min Kong (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea)
• 김대일(울산대학교 첨단소재공학부) | Daeil Kim (School of Materials Science and Engineering, University of Ulsan, Ulsan 44776, Republic of Korea) Corresponding author
• 김유성(한국생산기술연구원 울산본부 저탄소에너지그룹) | Yu-Sung Kim (Low-Carbon Energy Group, Korea Institute of Industrial Technology, Ulsan 44413, Republic of Korea)
• 최진영(한국생산기술연구원 울산본부 저탄소에너지그룹) | Jin-Young Choi (Low-Carbon Energy Group, Korea Institute of Industrial Technology, Ulsan 44413, Republic of Korea)
• 정범용(울산테크노파크 화학신소재기술센터) | Beom-Yong Jeong (Fine Chemical and Material Technical Institute, Ulsan Technopark, Ulsan 44412, Republic of Korea)