Silicon based anode materials offer high theoretical capacity but suffer from severe volume expansion and unstable interfacial properties during repeated lithiation and delithiation, resulting in rapid performance degradation. In this study, a thin aluminum oxide coating layer was deposited on Si/SiOx Carbon anode materials using a powder atomic layer deposition (PALD) process to address these limitations. EDS mapping and XRD analyses confirmed the uniform formation of an amorphous aluminum oxide coating with increasing thickness as the deposition cycles increased. Electrochemical evaluation showed that the electrode coated with 5 PALD cycles exhibited approximately 78% higher capacity retention after 100 cycles at 1 A g-1 and a higher initial Coulombic efficiency compared to the bare electrode. The coated electrode also delivered approximately 22% higher capacity at a high current density of 5 A g-1, indicating enhanced rate capability. Cyclic voltammetry analysis revealed increased surface controlled reaction contributions and improved reaction kinetics. These results demonstrate that PALD derived aluminum oxide coatings effectively stabilize the electrode electrolyte interface and enhance the electrochemical performance of silicon based anodes, highlighting their potential for next generation high capacity lithium ion batteries. generation high capacity lithium ion battery anode materials.

1. Introduction 
2. Experimental Section 
    2.1 사용 재료 
    2.2 소재 특성화 
    2.3 전기화학평가 
3. Results and Discussion 
4. Conclusion 
Funding
Conflict of Interest 
Data Availability Statement 
Author Information and Contribution 
Acknowledgments
References

• 신동건(한국세라믹기술원 반도체종합솔루션센터) | Donggeon Shin (Semiconductor Total Solution Center, Korea Institute Of Ceramic Engineering And Technology)
• 한윤수(한국세라믹기술원 반도체종합솔루션센터) | Yoonsoo Han (Semiconductor Total Solution Center, Korea Institute Of Ceramic Engineering And Technology) Corresponding author