The MR fluid jet polishing process operates on the principle that the viscosity of MR fluid changes in response to a magnetic field. By applying a magnetic field during slurry injection, the fluid is consistently sprayed in a laminar, straight flow, with the nozzle diameter nearly matching the size of the injected fluid. This ensures stable, straight-line spraying, even when the injection height changes. The factors influencing material removal and surface roughness, which are indicators of the polishing rate, can be categorized into process parameters occurring during the polishing operation and the material properties of the workpiece. Due to the independent effects of numerous factors and the interactions between them, the polishing characteristics are highly complex, making it essential to understand the underlying polishing phenomena. To analyze the factors influencing the results, design of experiments (DOE) and regression analysis were applied. The results revealed that, in the MR fluid jet polishing process, the most significant factor affecting surface roughness is the feed speed, followed by injection pressure, and finally, the magnetic field.

• 이정원(한국폴리텍대학 반도체융합캠퍼스 반도체측정과) | Jung-Won Lee Corresponding author