Alumina microcomponents have distinguishing advantages over Si counterpart. However, the shrinkage of alumina, as high as 20%, makes it difficult to produce precision components meeting a high tolerance. A new fabrication process presented to greatly reduce the shrinkage by producing alumina microcomponents from ultrafine Al powder. The process consists of forming Al powder components through sintering and turning the Al powder component into alumina. In this way, the shrinkage occurring in sintering the Al powder component will be compensated by the expansion appearing when the Al powder component turns into alumina. The process has proven successful.

• Kim
• J.S.
• Jiang
• K.
• Falticeanu
• L.
• Daviesd
• G.J.
• Chang
• I.