It is crucial to be sure about the safety of nuclear facilities for human resources who are in danger of radioactive emission, also diminishing the volume of the wastes that are buried under the ground. Chemical decontamination of nuclear facilities can provide these demands at the same time by dissolving the oxide layer, which radionuclides such as 60Co and 58Co have been penetrated, of parts that are utilized in nuclear plants. Although there are many commercial methods to approaching its aim and they perform a high decontamination factor, they have some issues such as applying organic acids which have the ability to chelate with radionuclides that can be washed by underground water, have large quantities of radioactive waste and damage to the surface by severe intergranular attack. A new method has been introduced by KAERI’s scientist which is named the HyBRID Process, in this process the main solution is the acidic form of Hydrazine. In this process, like other acid-washing processes, there is a chance of corrosion on the metal surface which is not desired. The metal surface is able to be protected during dissolving process by adding some organic and inorganic corrosion inhibitors such as PP2 and PP3. There is a very new research topic about ionic liquids (ILs) as corrosion inhibitors which illustrates a vast potential for this application due to their tunable nature and the variety of options for cationic and anionic parts. The key factors for ILs corrosion inhibitors such as the hardness properties are summarized. In this study, we review to the fundamentals and development of corrosion inhibitors for chemical decontamination and give an prospect with emphasis on the challenges to be overcome.