This study provides a comparison and analysis of the predicted damages related to hazardous chemical substances used in “A” solar cell manufacturing process. In order to predict potential damages, different accident scenarios were established using the ALOHA model and the KOSHA guideline. This study evaluates chemical spills and leaks from cylinder and pipeline. Maximum distance of chemical movement, based on an initial concentration of 150 ppm, was estimated as up to 258 m in summer and 251 m in winter. The impacts of the leakage of chemicals such as ammonia, were dependent on the initial concentration of the chemical leaked, the atmospheric stability and temperature, and the wind speed. All of those however, were affected by air humidity.