Carbon coils could be synthesized using C₂H₂/H₂as source gases and SF6 as an incorporated additive gas under thermal chemical vapor deposition (CVD) system. Prior to the carbon coils deposition reaction, two kinds of samples having different combination of Ni catalyst and substrate were employed, namely, a commercially-made Al₂O₃ceramic boat with Ni powders and a commercially-made Al₂O₃substrate with Ni layer. By using a commercially-made Al₂O₃ceramic boat, the synthesis of carbon coils could be enhanced as much as 10 times higher than that of Al₂O₃substrate. Furthermore, the dominant formation of the microsized carbon coils could be obtained by using Al₂O₃ceramic boat. The surface roughness of the supporting substrate of Al₂O₃ceramic boat was understood to be associated with the large scale synthesis of carbon oils as well as the dominant formation of the larger-sized, namely the microsized carbon coils.