Ni-based superalloys are widely used for critical components in aerospace, defense, industrial power generation systems, and other applications. Clean superalloy powders and manufacturing processes, such as compaction and hot isostatic pressing, are essential for producing superalloy discs used in turbine engines, which operate under cyclic rotating loads and high-temperature conditions. In this study, the plasma rotating electrode process (PREP), one of the most promising methods for producing clean metallic powders, is employed to fabricate Ni-based superalloy powders. PREP leads to a larger powder size and narrower distribution compared to powders produced by vacuum induction melt gas atomization. An important finding is that highly spheroidized powders almost free of satellites, fractured, and deformed particles can be obtained by PREP, with significantly low oxygen content (approximately 50 ppm). Additionally, large grain size and surface inclusions should be further controlled during the PREP process to produce high-quality powder metallurgy parts.